Device and process for crucible-less zone-melting of a semiconductor crystal rod which, at its lower end, is provided with a fused-on seed crystal and which is supported perpendicularly to both ends

摘要

The invention relates to a device for crucible-less zone melting of a semiconductor crystal rod (2) which, at its lower end, is provided with a fused-on seed crystal (1). The rod end (3) containing the seed crystal (1) is braced by a structure comprising at least three supporting arms (4) co-rotating with the semiconductor crystal rod (2). Each supporting arm (4) comprises the pole shoes (5, 6) of an electromagnet (7) and at its upper end has an inclined plane (8) made from a non-magnetic material. Between the ends of the pole shoes (5, 6) and in the acute angle formed by the inclined plane (8) and the semiconductor crystal rod (2) there is a support disc (9) made of ferromagnetic material. If a pulsed direct current is applied to the electromagnet (7), the supporting disc (9) is slowly moved towards the semiconductor crystal rod (2). <IMAGE>