发明名称 |
METHOD AND APPARATUS FOR MANUFACTURING SINGLE CRYSTALS |
摘要 |
<p>The invention provides a method and an apparatus for manufacturing single crystals wherein the weight of the single crystal pulled is measured by a weight detector. The measured weight is compared with a reference weight signal which is generated from a reference weight signal generator. A weight deviation signal representing a difference between these two signals is generated by a weight deviation detector. The weight deviation signal is differentiated by a first differentiation circuit and a differentiation output signal obtained is corrected for compensation for the buoyancy of the liquid encapsulant by a signal which is generated by a buoyancy correction signal generator. A corrected signal thus obtained is differentiated by a second differentiation circuit and is thereafter added to the corrected signal. The addition result is phase-compensated by a phase-compensating circuit. The phase-compensated signal is supplied to a heating control circuit. At the same time, the heating control circuit generates a heating control signal to a heating device in response to a program signal which is generated from a program signal generator. In response to the output signal from the heating device, a heater which controls the temperature of the melt held in a vessel and which is arranged outside the vessel is heated according to the program.</p> |
申请公布号 |
EP0056572(B1) |
申请公布日期 |
1985.05.08 |
申请号 |
EP19820100034 |
申请日期 |
1982.01.05 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
WASHIZUKA, SYOICHI;USHIZAWA, JISABURO;KOKUBUN, YOSHIHIRO;FUKUDA, TSUGUO |
分类号 |
C30B15/28;C30B27/02;C30B29/40;H01L21/208;(IPC1-7):C30B27/02 |
主分类号 |
C30B15/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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