| 摘要 |
PURPOSE:To obtain an optical memory element having excellent reliability to corrosion due to oxygen or the like by providing a resin material having a guide groove on a substrate and forming an optical memory recording medium layer sandwiched between two layers of a transparent dielectric film consisting of a nitride on said resin material. CONSTITUTION:A resin layer 3 cured by the ultraviolet ray irradiation having the ruggedness molded by 2P method is provided on a substrate 5 made of glass or acrylic resin and an AlN film (a transparent dielectric film) 6 is formed thereon by a reactive sputtering of Al in the nitrogen atmosphere. A CdTbFe- amorphous alloy thin film (a recording medium) 7 is formed on the film 6 by a sputtering and an AlN film 8 is formed thereon, furtheremore a reflective film 9 consisting of Cu, Al and Ni or the like is formed on the film 8. Because the penetration of oxygen and moisture into the alloy thin film 7 is prevented by the nitride films 6, 8, an optical memory element having excellent reliability to corrosion is obtained. |
