| 摘要 |
PURPOSE:To contrive the generation of stable glow discharge and the improvement of the working efficiency of the titled device by preventing electrode oxidation by the use of Au for a discharge electrode. CONSTITUTION:CO2 gas A sealed under less than the atmospheric pressure is circulated by a blower 2 along guide blades 3 from a wind tunnel 4 to a discharge section 5. Many split pin electrodes 6a and one to plurality of piceses bar electrodes 6b are provided in the section 5, and discharge parts are Au- plated. A glow discharge G is generated by application of a high voltage between the electrodes 6a and 6b. The discharge energy is converted into a laser beam B by a resonator 8, and the remnant decreases the oscillation efficiency by heating the CO2; therefore the temperature increase of the CO2 is prevented by a heat exchanger 9. The stable laser processing can be performed by this construction. |
