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发明名称
PROBE NEEDLE
摘要
申请公布号
JPS6080772(A)
申请公布日期
1985.05.08
申请号
JP19830188695
申请日期
1983.10.08
申请人
ROOMU KK
发明人
TANIMOTO KATSUMI
分类号
G01R1/067;G01R1/06;G01R1/073;H01L21/66
主分类号
G01R1/067
代理机构
代理人
主权项
地址
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