| 摘要 |
PURPOSE:To diebond a pellet firmly by means of fixing the pellet through the intermediary of a metal layer comprising two layers i.e. an aluminum layer and a tin layer. CONSTITUTION:A silicon-made pellet 3 is diebonded on a tub 2 coated with a metal layer 9 with its surface excellently adhesive to tin through the intermediary of an aluminum layer 7 coatingly formed on the backside of the pellet 3 and a tin layer 8 further coatingly formed on the backside of the aluminum layer 7. The pellet 3 may be firmly diebonded on the tub 2 since aluminum is excellently adhesive to silicon as the pellet material which is also excellently adhesive to the material metal of pellet fixing surface. |
