发明名称 PROCESS OF SURFACE TREATMENT
摘要 PURPOSE:To make the terminal detection of surface treatment feasible all over a treated sheet by a method wherein the terminal of surface treatment is assumed to be the time when detection signal levels do not exceed the specified target level successively whithin specified period at specified times. CONSTITUTION:Any transmitting or reflecting light quantity to or from a treated sheet 1 is continuously detected by a photoelectric conversion element to detect the status of surface treatment by the changing detection levels. In such a procedure, the detection signal levels are detected if they exceed the specified target level successively within specified period at specified times. When they exceed the target level, the changing detection signal levels are repeatedly detected by means of successively setting up the next target level. The terminal of surface treatment may be assumed to be the time when it is detected that the detection signal levels do not exceed the last target level within specified period.
申请公布号 JPS6079728(A) 申请公布日期 1985.05.07
申请号 JP19830188035 申请日期 1983.10.06
申请人 DAINIHON SCREEN SEIZOU KK 发明人 OOKAMI NOBUTOSHI;KITAGAWA MASARU;NISHIZAWA HISAO;SAIDA MASAKAZU
分类号 C23F4/00;G03C5/00;G03F1/00;G03F7/26;H01L21/027;H01L21/306 主分类号 C23F4/00
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