| 摘要 |
<p>PURPOSE:To obtain a plurality of electric field emission beams having high luminance and high stability simultaneously from a single electric field emission chip, by taking out a plurality of electric field emission beams with restricted, radiant angle of W(100) plane from a single sharp needle. CONSTITUTION:A wire of W having axial bearings <110> of such as 0.1- 0.15mm. in diameter is spot welded to the top end of a heating element 11 of W formed to V-shape, and the tip of the wire is sharp-pointed by electrolytic grinding by using such as aqueous solution of KOH to make a sharp needle 12. Subsequently, Ti is adhered to the V-shaped tip of the heating element 11 and a Ti supply source 13 is formed by passing a heating current to the heating element 11 in a vacuum. At the tip of the sharp needle 12, atmospheric oxygen is taken in and an absorption layer of Ti and oxygen is formed thereon. When a high voltage is applied to an opposing anode 14 in this condition, the work function on the (100) crystal plane of the sharp needle 12 of W having axial bearings of <100> decreases, and two electric field emission beams 15a, 15b having high luminance with restricted radiant angles to bearings of <100> are obtained.</p> |
