| 发明名称 |
Planarization method |
| 摘要 |
A process for producing an extremely smooth or planarized layer of material employs a polymeric material which, when melted has a viscosity enabling it to flow into all crevices and voids on the treated surface. Subsequent heating cures the polymer to form a planarized layer.
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| 申请公布号 |
US4515828(A) |
申请公布日期 |
1985.05.07 |
| 申请号 |
US19810222195 |
申请日期 |
1981.01.02 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ECONOMY, JAMES;FLANDERA, MARY A. |
| 分类号 |
C09D5/23;B05D5/00;B05D7/14;B05D7/24;C09D4/00;C09D161/04;C09D163/00;C09D179/08;G11B5/84;(IPC1-7):B05D5/12 |
主分类号 |
C09D5/23 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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