| 摘要 |
PURPOSE:To improve the operation efficiency of a device by a method wherein a process requirement is called up from memory per processing stage to perform the process continuously if the process requirement of a lot in process and that of a lot for the next process are similar to each other. CONSTITUTION:A semiconductor substrate placed on the specified position from a loader 1 is shifted to the first processing stage 2-1, the second processing stage 2-2, the Nth processing stage 2-N by means of conveyors etc. to bedischarged from an unloader 3. Each stage is provided with respective device for various processes to be controlled by a controller 4 equipped with a memory 4a. When the processing stages are charged with the lots, the lots may be continuously processed without resetting a new process requirement. |
