发明名称 Dispenser for ion source
摘要 A dispenser for supplying metal vapor to an ion source. The metal is provided in a capsule which may be broken to release the metal by turning a knob which causes a capsule housing to move to the right, thus causing the capsule to break against a piston member. The piston member communicates with a conduit which in turn communicates with the associated ion source, partly shown in the drawing. A heating mantle is provided to vaporize the metal in the housing so that it can pass from the dispenser through a conduit, to the ion source.
申请公布号 US4516052(A) 申请公布日期 1985.05.07
申请号 US19820384321 申请日期 1982.06.01
申请人 DUBLIER SCIENTIFIC LIMITED 发明人 PREWETT, PHILLIP D.;JEFFERIES, DEREK K.;PASHLEY, NEIL A.;COCKHILL, THOMAS D.
分类号 H01J37/08;H01J3/04;H01J27/02;H01J27/26;H01J49/04;(IPC1-7):H01J17/26;B65D47/10 主分类号 H01J37/08
代理机构 代理人
主权项
地址