发明名称 DEVICE FOR INSPECTING JOINT PART
摘要 PURPOSE:To inspect a joint part without contacting and with good accuracy by dividing the video obtd. by using an image sensing means with the joint part to plural lines and scanning successively the respective lines. CONSTITUTION:An inspecting device consists of an image pickup means IP and a processing means PC. The means IP picks up the image of the joint part of joined members, divides the video formed on the image pickup surface to plural lines, scans successively the respective lines, converts the videos to electrical signals and outputs the same. On the other hand, the means PC is inputted with the video signal from the means IP and decides whether the correction of the width data of the joint part in each line is required or not in association of said data with the width data of the other lines. Said means decides whether the joint part is defective or non-defective in accordance with the respective width data determined according to the result of the decision. The inspection of the joint part is thus accomplished without contacting and with good accuracy.
申请公布号 JPS6078306(A) 申请公布日期 1985.05.04
申请号 JP19830184982 申请日期 1983.10.05
申请人 HITACHI SEISAKUSHO KK 发明人 KATOU SHIYUUZOU;TAKAHASHI TSUTOMU
分类号 G01B11/28;G01B11/24;H01L21/60;H01L21/66 主分类号 G01B11/28
代理机构 代理人
主权项
地址