发明名称 PROJECTING AND EXPOSING DEVICE
摘要 PURPOSE:To stabilize imaging characteristics such as projecting magnification and the position of an imaging plane, etc. by passing air into the inter-lens spacing of a part of a projecting lens, monitoring further the change in atm. pressure and outdoor air temp. and controlling the pressure in the other inter- lens spacing of the projecting lens. CONSTITUTION:A microcomputer (CPU)22 reads out via an interface 25 the respective outputs from a pressure detector 20, a temp. detector 21 and an environment sensor 23. The CPU operates a pressure control part 18 according to the measured values of the atm. pressure, the temp. of the outdoor air, the temp. of a lens L5 and the pressure in a spacing 2 obtd. in the above-mentioned way thereby controlling the pressure of the spacing 24. The magnification error of a projecting lens 1 is thus made zero. The CPU22 operates a stage driving part 26 to adjust the position of the imaging plane. The CPU controls further a fan 4 to feed air to the spaces 10, 11, 12 thereby making zero the magnification error owing to a temp. rise. The imaging characteristics such as imaging magnification and position of the imaging plane, etc. are thus stabilized.
申请公布号 JPS6078456(A) 申请公布日期 1985.05.04
申请号 JP19830186266 申请日期 1983.10.05
申请人 NIHON KOUGAKU KOGYO KK 发明人 TANIMOTO SHIYOUICHI;IMAMURA KAZUNORI
分类号 G03B27/34;G03F7/20;G03F7/207;H01L21/027;H01L21/30 主分类号 G03B27/34
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