| 摘要 |
PURPOSE:To provide a titled device which permits simple and easy putting in and out of a drum-shaped body in a transverse direction into a cylindrical electrode provided around the drum-shaped base body by forming longitudinally a notch to said cylindrical electrode and constituting the cylindrical electrode movably in the transverse direction. CONSTITUTION:A notch is longitudinally formed to a cylindrical electrode 10 supported perpendicularly by a supporting bar 15 and blowoff and discharge holes 30, 31 for a reactive gas are formed between both end faces 11, 12 of said electrode and both side walls 20, 21 of a header assembly 19 having a sectorial shape with a chemical vapor deposition device which deposites the resultant product of reaction on a drum-shaped base body 18 by disposing coaxially the body 18 in the electrode 10 and bringing the reactive gas introduced into the annular space between the electrode and the base body into reaction by the electric discharge generated when a voltage is impressed to the electrode 10. The electrode 10 moves horizontally in a transverse direction up to the position of a chain line 10A and the base body 18 is made easily put into and out of the electrode 10 by moving horizontally said body in the transverse direction and passing the same through the above-mentioned notch. |
