| 摘要 |
PURPOSE:To provide a titled discharge system for blowoff of gas which improve the high utilizing efficiency of a reactive gas by the constitution in which a header assembly is disposed to the notch formed in the longitudinal direction of an enclosing electrode enclosing a cylindrical base body and the reactive gas is supplied in the space between the base body and the electrode. CONSTITUTION:A notch extending in the longitudinal direction of a cylindrical electrode 10 enclosing a drum-shaped base body 18 is formed and a header assembly 19 supported by a supporting pipe 25 is installed between the end faces 11 and 12 at both ends of the notch with a chemical vapor deposition device which deposites the resulted product of decomposition on the circumferential surface of said base body 18 by decomposing a reactive gas in a vacuum by discharge of a high-frequency voltage. The reactive gas supplied from a supply pipe 26 provided in the pipe 25 of such assembly 19 is blown off into the space between the electrode 10 and the base body 18 through a flexible pipe 27, a blowoff chamber 22, apertures of flow regulating plates 28A-C and a blowoff hole 30. The gas is passed through a radially long effective flow passage and is then discharged from the pipe 25 through a discharge hole 31, a discharge chamber 23 and an intermediate chamber 24. |
