发明名称 HANTEREN VAN ARTIKELEN.
摘要 An article handling device which is particularly well suited for loading articles into a reactor furnace for processing and subsequently unloading the processed articles. The article handling device is supported and vertically movable into alignment with the reactor furnace and includes an article moving device which is reciprocally vertically elevatable and reciprocally horizontally extensible for loading the articles into the reactor furnace and subsequent unloading thereof with minimal disturbing of the reactor process residue which is inherently deposited in the interior of the reactor furnace.
申请公布号 NL8402907(A) 申请公布日期 1985.05.01
申请号 NL19840002907 申请日期 1984.09.21
申请人 ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC. TE PHOENIX, ARIZONA, VER. ST. V. AM. 发明人
分类号 B25J9/00;B25J17/02;B65G47/90;H01L21/22;H01L21/31;H01L21/67;H01L21/677;(IPC1-7):B25J11/00;C30B31/00;C30B31/14;B01J19/18;C23C16/54 主分类号 B25J9/00
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