发明名称 INTEGRATED CIRCUIT EVALUATING DEVICE
摘要 PURPOSE:To remove any measuring error due to drop of the internal voltage of a driver by a method wherein the voltage source of the driver is controlled corresponding to the value of current to run through the driver for voltage impression. CONSTITUTION:A controller 1 controls a voltage source 4 according to the program, the set voltage is successively impressed on the terminals 7 of a driver 3, which are connected to each chip terminal 2, and evaluation on chips is performed according to whether what type of voltage and current arise on prescribed terminals 2 among the terminals 2. An ammeter 5 is provided at the driver 3, the value of current of flow through the driver 3 is inputted in the controller 1 as a datum and a voltage drop component due to the internal resistance of the driver 3 is made a feedback control by the controller 1. As a result, the set voltage is enabled to accurately impress.
申请公布号 JPS6076133(A) 申请公布日期 1985.04.30
申请号 JP19830183660 申请日期 1983.09.30
申请人 MATSUSHITA DENKO KK 发明人 SHINMIYOU YOSHIHIKO
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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