摘要 |
PURPOSE:To remove any measuring error due to drop of the internal voltage of a driver by a method wherein the voltage source of the driver is controlled corresponding to the value of current to run through the driver for voltage impression. CONSTITUTION:A controller 1 controls a voltage source 4 according to the program, the set voltage is successively impressed on the terminals 7 of a driver 3, which are connected to each chip terminal 2, and evaluation on chips is performed according to whether what type of voltage and current arise on prescribed terminals 2 among the terminals 2. An ammeter 5 is provided at the driver 3, the value of current of flow through the driver 3 is inputted in the controller 1 as a datum and a voltage drop component due to the internal resistance of the driver 3 is made a feedback control by the controller 1. As a result, the set voltage is enabled to accurately impress. |