| 摘要 |
PURPOSE:To form a magnetic film having a high magnetoresistance effect by orienting the azimuth of crystal grains in (111) plane in the film. CONSTITUTION:The crystal grains of a thin ferromagnetic film having magnetoresistance effect are oriented, and the azimuth of the grains is oriented in (111) plane in the film. When A magnetic film having the excellent orientation of the crystal grains can be formed, the magnetoresistance effect can be enhanced. The effect is plotted with respect to the ratio of the (200) and (111) diffraction strengths of the films formed by altering the depositing conditions as shown. From this graph, there is good correlation between the orientation of the grains and the magnetoresistance effect, and it is understood that the film having relatively many (111) planes has large magnetoresistance effect. |
