| 摘要 |
PURPOSE:To miniaturize and lighten a device, and to detect acceleration with high accuracy by sensing variation by acceleration of tunnel currents flowing between first and second electrodes. CONSTITUTION:When DC voltage V is applied between first and second electrodes 2, 4, J in a current formula 1 flows between the first and second electrodes 2, 4 by a tunnel effect. Where J0 and C represent proportionality factors and l12 represents a space between the electrodes 2, 4, e charge element quantity, E a difference between the energy of electrons in a conductor and the potential energy of a conductor element surface and h a Planck's constant. When 10K-g acceleration by an acceleration detecting element is applied vartically (as the downward forward direction), the space between the first and second electrodes 2, 4 is represented in formula 2. Where K represents a structural elastic constant to the bending of the nose section of the second electrode 4. Consequently, tunnel currents J' flowing between the electrodes 2, 4 are represented in formula 3 at that time. Accordingly, acceleration is represented in formula 4, and can be detected and measured as a function of the change J' of currents. |
