| 摘要 |
PURPOSE:To perform the heating of samples uniformly with a good reproductivity by providing a heater in a tray on which smples are attached so as to heat the samples with supplying the power through a supporting part of a transporting mechanism of the tray. CONSTITUTION:A supporting part of a transporting mechanism including a chain 5 and rollers 6 is electrically isolated e.g. from a main reactio chamber 1 by an insulating glass 8 and a leading wire 10 is led out from a fixing part 9. The power supply to the tray 14 is done through the rollers 6 and samples are attached on the tray 14. When the tray 14 enters in the main reaction chamber 1 and stops in the predetermined position, a gate valve 3 is closed, when the valve is completly closed, the lead 10 is electrically conducted to heat a heater 12 and a tray 14 is heated directly to heat the samples. As heating of the tray 14 is done by the heater 12 directly, it is carried out firmly and uniformly with a good reproductivity and there is no effect of a gas flow and the like being exerted. |
