发明名称 FLAT PLATE CRYSTAL FORMING DEVICE
摘要 PURPOSE:To form thinner flat plate crystal using a mold by a method wherein the periphery part of a mold is made of wettable material with raw liquid material while the central part is made of unwettable material with liquid material. CONSTITUTION:A substrate 51 of a mold made of carbon material is baked after coating its surface and sides with mold lubricant 52 made from silicon nitride added with a bit of aluminum oxide. The applicable carbon material is isotropic avoiding any camber etc. during backing process subject to thermal expansion coefficient not exceeding 4X10<-6>/ deg.C. After the baking process, the peripheral part 53 of the mold is scraped off to expose the substrate 51 to atmosphere. When a mold 61 is set up, a locating plate 62 is screwed into the mold 61 and another mold 63 is placed on another locating plate 64. A weight 67 is placed on one 66 of the heat retaining plates 65, 66 while entire device is contained in a chamber 68 filled with argon gas. High frequency coils are shown by 69. A flat plate may be formed by means of inserting a silicon material between the molds 61 and 63 and heating it with high frequency coils after setting up the weight 67.
申请公布号 JPS6074506(A) 申请公布日期 1985.04.26
申请号 JP19830180198 申请日期 1983.09.30
申请人 TOSHIBA KK 发明人 NAKAGAWA KOUJI
分类号 H01L31/04;H01L21/02;H01L21/208 主分类号 H01L31/04
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