X-RAY EXPOSING PROCESS AND DEVICE,申请号JP19830180684-传众专利搜索

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发明名称	X-RAY EXPOSING PROCESS AND DEVICE
摘要
申请公布号	JPS6074518(A)	申请公布日期	1985.04.26
申请号	JP19830180684	申请日期	1983.09.30
申请人	HITACHI SEISAKUSHO KK	发明人	KENBOU YUKIO;KUJI TOMOHIRO
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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