| 摘要 |
PURPOSE:To ensure contact of the conveyig mechanism of a load locking device and the thermocouple thereof and to accurately perform temperature measurement of a sample by a method wherein the conveying mechanism is utilized intact for lead-out use of signal, which is sent from the thermocouple. CONSTITUTION:The supporting part of the bottom part of a conveying mechanism consisting of a chan 5 and rollers 6 has been electrically nsulated from a load locking device proper by an insulator 8; electrode lead-out parts 14a, where a tray 14 contacts to the rollers 6, have been electrically insulated from the tray proper by insulators 14b; and a thermocouple 10 has been connected to the electrode lead-out parts 14a. A signal is led out from the tray 14, whereon a sample has been installed, by a leas wire 9 through the rollers 6 and fixed parts 7. For upgrading the precision of temperature measurement of the sampel, the surface of the conveying mechanism is coated with a material of the same quality as that of the thermocouple 10. |
