| 摘要 |
PURPOSE:To easily realize a displacement transducer which has a small nonlinear error by forming slits in either of a phase plate and a code plate. CONSTITUTION:When the phase plate 2 having diamond slits are used, the signal waveform (c) that respective outputs of a photodiode show in different phases for the displacement of the code plate 1 has less higher harmonics and is closer to a sine waveform than a triangular wave (a). Consequently, use of this phase plate reduces the influence of higher harmonic components to reduce the nonlinear error of the displacement transducer greatly. |
