发明名称 PARTS TESTING DEVICE
摘要 PURPOSE:To enable to simultaneously perform the press-holding and the heating or the cooling of a parts by a blow-off fluid and to reduce the machine ducting time by a method wherein the parts holding member, by which the parts is held in a vacuum attracted state and is conveyed, possesses in combination with a fluid feeding path for test, from where a hot air or a cool air is blown off. CONSTITUTION:An electronic parts 1 is conveyed by attraction on the testing stand, where is a target position 12, from other place. The attraction is one in a way that a three-port connection electrovalve 6a, which is the path change-over means, is selectively changed-over so that a piping 5 is conducted to a vacuum generating unit 7 and the electronic parts 1 is vacuum-attracted by the piping 5 through a path 3a. Then, after the electronic parts 1 is conveyed at the position on the testing stand, a holder 11 is left stopping at the position intact and the three port connection electrovalve 6a is changed-over so that the path thereof is connected to a hot air generating unit 8. By this change-over, a hot air passes through the interior of the path 3a of a head 2a from the piping 5 and the hot air is sprayed on the upper surface of the electronic parts 1. The electronic parts 1 is press-held by the blow-off of the said hot air and is stably placed at the prescribed position. Moreover, the head 2a is made to ascend along the hole 11a of the holder 11 by the back pressure of the hot air and with this ascension, the gap between the holder and the head is increased and the blow-off amount F of the hot air is augmented.
申请公布号 JPS61236134(A) 申请公布日期 1986.10.21
申请号 JP19850076375 申请日期 1985.04.12
申请人 HITACHI LTD 发明人 AJIKI NAOJI
分类号 G01R31/26;H01L21/66;H01L21/677 主分类号 G01R31/26
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