发明名称 |
Workpiece holder for polishing operation |
摘要 |
The workholder includes a carrier to which a flat perforated template is removably secured. An insert is removably mounted in each hole and removably supports a silicon wafer to facilitate polishing the wafer.
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申请公布号 |
US4512113(A) |
申请公布日期 |
1985.04.23 |
申请号 |
US19820422124 |
申请日期 |
1982.09.23 |
申请人 |
BUDINGER, WILLIAM D. |
发明人 |
BUDINGER, WILLIAM D. |
分类号 |
B24B37/04;B24B41/06;H01L21/302;(IPC1-7):B24B41/06 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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