| 摘要 |
PURPOSE:To obtain a crystal substrate having excellent surface conditions by providing a wavy guide in parallel with the drawing direction of a sliding boat, and dipping the substrate in a molten liquid for growth while moving the substrate up and down to carry out the multilayer epitaxial growth. CONSTITUTION:The wave guides 8 are provided in parallel with the sliding direction 7 of a molten liquid holder 6. A slider 10 furnished with a substrate 9 for growth is drawn in the sliding direction 7, and the substrate 9 is moved up and down along the guides 8. After the substrate 9 is firstly brought into contact with a molten liquid 11 under desired growing conditions and the epitaxial growth is carried out, the substrate 9 is lifted up along the guides 8 and moved to the succeeding molten liquid tank without being brought into contact with a partition between the molten liquids 11 to undergo the epitaxial growth. The scratches due to the contact with the partition and the deposition of carbon, etc. on the boat can be prevented in this way. |
