| 摘要 |
A protective passivation structure is provided for a thermal ink jet printing head which employs a resistive heating element formed of phosphorus-diffused silicon. The passivation structure includes a layer of silicon nitride over the heating element with a layer of silicon carbide over the silicon nitride layer. The nitride exhibits good adhesion to the underlying silicon as well as good thermal conductivity. The carbide has exceptionally good wear and hardness qualities against ink bubble cavitation as well as adhering well to the nitride.
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