摘要 |
PURPOSE:To obtain a desired spectrum, from which background is removed, by providing a specified X-ray sensor, in an X-ray microanalyzer having a waveform-dispersion type X-ray spectroscope. CONSTITUTION:An X-ray sensor 19, which obtains an output that is proportional to background intensity at the shortest-wavelength position of a spectroscope, is provided. Based on the output of the sensor 19, a counted value per second is found by a counting rate meter 14 upon the switching of an interlocking switch 20. When the counted value is inputted by an input key 18, the function of a background curve is formed by a function generating and subtracting device 17. In actual measurement, the switch 20 is returned to the measuring position. Then the output of an X-ray detector 7 is processed and the subtracting device 17 is operated at the same time. Subtraction is performed in accordance with the change in wavelength of the X rays. Thus the desired spectrum, from which the background is removed, can be obtained. |