| 摘要 |
PURPOSE:To obtain a semiconductor gas detection element having high reliability and high sensitivity, by coating a specific metal wire with a gas responsive semiconductor before sintering. CONSTITUTION:In a semiconductor gas detection element formed by coating a metal wire with a gas responsive semiconductor and sintering the whole, the metal wire is constituted by using a metal having coefficient of electric resistance temp. smaller than that of pure platinum, for example, an alloy consisting of Pt and Ir, Pd or Ag. By this method, the variation in the resistance value of a sensor caused by mechanical shock is suppressed and, because of a large SN ratio, a semiconductor detection element having high sensitivity and high reliability is obtained. |
