| 摘要 |
PURPOSE:To form a uniformly thick film on the whole surface of a base with a soln. at the time of spin coating the base, such as an optical disc with the soln. contg. a film-forming material by dropping a soln. higher in viscosity near the center of the disc and another soln. lower in viscosity on the more outside while slowly rotating the disc. CONSTITUTION:The base 1 for use in an optical disc, a compact disc, and the like is coated with a photoresist thin film, by feeding the soln. higher in viscosity contg. the film-forming material near the center of the base 1 from a nozzle 4 and feeding the soln. lower in viscosity from a nozzle 5 on the more outside part of the base while rotating it at low speed to mix both solns., thus permitting the viscosity in the central part to be higher and reduced in the radiate direction, as shown in figure II, and the coating amt. Y1 of each of (a) the soln. higher in viscosity and (b) the soln. lower in viscosity film thickness, as shown on figure I, X is the radiate direction to be made uniform in film thickness from the center to the peripheral end by rotating the base 1 fixed with a chuck table 2 connected with a spindle 3 at high speed, and hence, exposure and development conditions to be easily selected and a pattern high in precision to be formed. |
