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发明名称
摘要
申请公布号
JPS6056467(U)
申请公布日期
1985.04.19
申请号
JP19830148705U
申请日期
1983.09.24
申请人
发明人
分类号
H01L21/301;B24D5/12;B28D5/02;H01L21/78;(IPC1-7):B24D5/12
主分类号
H01L21/301
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