| 摘要 |
PURPOSE:To enable easy and quick sepn. and to make its process simpler and faster in the stage of transferring a mask film body to a holding body by acting an ultrasonic wave to separate a flat plate and the mask film body. CONSTITUTION:An X-ray transmission layer 2 consisting of a high polymer film of polyimide, etc., an X-ray absorbing layer 3 of a mask pattern consisting of gold, platinum, etc. and an X-ray transmission layer 4 similar to the layer 2 are successively laminated on a flat plate 1 consisting of an Si wafer or the like provided with an oxide layer on the surface thereby manufacturing a mask film body 5. A holding body 6 is for mask of a toric shape and is formed of, for example, quartz, glass, etc. An adhesive agent is uniformly coated on the body 6 and the inverted plate 1 and the body 5 are placed and adhered thereto. The holding body 6, the film body 5 and the flat plate 1 which are joined upon curing of the adhesive agent are put into a solvent and an ultrasonic wave is acted thereon to separate the plate 1. Water, a polar solvent such as alcohol, ketone or the like and others are preferable for the solvent. |
