| 摘要 |
PURPOSE:To transmit immediately the heat generated by a mask material during working to a heat conductive holding base plate and to enable prevention of deterioration owing to local evolution of heat by bringing the heat conductive layer of a thin film for holding the mask material into contact with said base plate. CONSTITUTION:A mask material 1 is formed in a desired pattern to the inside of a holding thin film 2. The film 2 contains a heat-conductive layer 2a and the mask material 1 is positioned in contact with the layer 2a. The periphery of the film 2 is adhered to a toric holding base plate 3. The plate 3 consists of metals such as iron, cobalt, nickel, tungsten, molybdenum, etc. or the alloy thereof and is so formed that the plate can be attached and detached to and from a lithography device by means of a magnetic chuck. The layer 2a consists of gold, silver, copper, aluminum, beryllium, tin, etc. The layer 2b allows transmission of irradiation energy and holds the material 1 together with the layer 2a. Said layer consists of boron nitride, silicon nitride, silicon oxide, etc. |
