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发明名称
SURFACE INSPECTION SCANNING SYSTEM
摘要
申请公布号
AU543465(B2)
申请公布日期
1985.04.18
申请号
AU19810077682
申请日期
1981.11.20
申请人
FORD AEROSPACE + DOMMUNICATIONS CORP.
发明人
W. JERRY ALFORD;CHARLES J. CUSHING;JAMES D. HUNT;MICHAEL L. SMITH;RICHARD D. VANDERNEUT;JAMES L. WILKES
分类号
H01L21/66;G01N21/88;G01N21/956;(IPC1-7):G01N21/88
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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