| 摘要 |
PURPOSE:To facilitate observation eliminating any complicated operation and calculation by letting a shearing interference fringe plotting an abberation curve directly utilizing lateral deviation in the interference fringe caused by tilting. CONSTITUTION:A first hologram H1 performs a double-exposure recording of an interference fringe between parallel lights fH2 and fH(2+DELTA) and a reference light fH1 illuminated through a collimator lens L6. A second hologram H2 performs a double-exposure recording of an interference fringe between light fH2 reproduced by an illumination light to the hologram H1 from the direction of the light fH1 and a reference light fH3 and an interference fringe between the light fH(2+DELTA) and the other reference light fH(3+DELTA) obtained by turning the light fH3 about a parallel in the direction of shearing it. A lens LT to be inspected is placed at the position of the lens L6 and the hologram H2 is illuminated through the lens LT and then, done by the reproduced light from the hologram H1 whereby an interference fringe formed by the reproduced light from the hologram H2 is observed. |
