| 摘要 |
PURPOSE:To read out automatically depths of grooves for rapid identification of an article, by, in a plurality of grooves of a plurality of kinds and in a groove- shaped recesses pvovided with direction indicating groove, installing an identification circuit for reading out a symbol mark expressed by the depth of groove. CONSTITUTION:On the surface of a plane-shaped pallet 1 used for transportation of semiconductor articles, groove-shaped recesses 2 are constructed. These recesses 2 are composed of grooves 2a-2i of 3 different kinds per each constant distance l, among the grooves, excepting shallow ones 2a, 2c, 2f, 2g and 2i, other ones are combination of grooves of 2 kinds forming binary symbol marks. The deepest groove 2i represents a direction indicating groove locating the groove 2a side on a high value side and the groove 2f side on a low value side. A detector 3 moves up and down along the groove transmitting its displacement to the identification circuit 4. The circuit 4 judges the mark data from the read out result of the detector 3 to identify the kind of the article. The direction indicating groove 2i is excavated to allow the same identified result to be obtained regardless of the direction of scanning of the detector 3. |
