| 摘要 |
PURPOSE:To stably obtain thin films of a high conductivity and a high adhesion force with substrates by a method wherein, in the preparation of a photo battery with selenium as the base metal, an amorphous selenium thin film is adhered on a transparent conductive layer or a transparent insulation layer, and the thin film is changed into a crystalline selenium thin film by photo irradiation or both use of photo irradiation and heating. CONSTITUTION:The transparent conductive layer 2 serving as an electrode is adhered on the glass substrate 3, and a metallic or semiconductor thin film 4 to reinforce the adhesion force is deposited thereon to a thickness of 5-100Angstrom . Next, the amorphous selenium layer 1 of 0.2-5mum thickness is deposited thereon. This laminated body is heated to room temperature or 200 deg.C, and at the same time irradiated with light, thereby crystallizing the layer 1. Such a manner enables the spectral sensitivity to increase to the side of short wavelength, and to become suitable for a room power source under fluorescent lighting. |
