| 摘要 |
PURPOSE:To reduce the breakdown rate of a resistor significantly and improve the reliability of the device even if defective spots exist in a protective film by providing an electrode giving an electric potential to liquid and also a resistor containing a specific amount of tantalum. CONSTITUTION:An electrode 10 for giving an electric potential to liquid 12 is provided and also a resistor 9 containing more than 30atom% of tantalum Ta is prepared. If the voltage Vink is set within a prearranged range, the surface of the resistor 9 is subjected to anodic oxidation through defective spots 13 in a protective film. Thus said surface is covered with an inert tantalum oxide with satisfactory results. |
