| 摘要 |
PURPOSE:To obtain a polarizing element which is highly resistant to heat and moisture, is thin, decreases insertion loss and has high light transmittability by forming a fine diffraction grating consisting of a thin film of transparent conductive oxide on a transparent base plate. CONSTITUTION:A thin film 2 of transparent conductive oxide such as SnO2, Sb-doped SnO2, In2O3, Sn-doped In2O3 or the like is formed on a transparent base plate 1 of glass, molten quartz, polymethyl methacrylate or the like. Resist is then coated on the film 2 and is exposed with far UV rays or X-rays by using a mask formed with a resist pattern by electron beam working or is holographically exposed by using two-beam split light for which an He-Cd laser, Ar laser or the like is used. The resist is then etched after said exposure and the residual photoresist is removed by which a diffraction grating film 2 is formed. The polarizer which has high transmittance of the polarizing component and is suitable for a liquid crystal display device, etc. is thus obtd. |
