| 摘要 |
PURPOSE:To eliminate easily the step of a lower layer coil by forming preliminarily the frame of a heat resistant org. material between the coils in the stage of forming the lower layer coil. CONSTITUTION:A heat resistant org. material (photovarnish) 2 is coated on a base plate 1 and a reversal pattern 3 of a lower layer coil is formed by photoresist 3. The photovarnish 2 except the pattern is etched. An Al-Cu alloy to serve as layer coil part 4 is deposited thereon and the photoresist 3 and the Al- Cu alloy are simultaneously removed. The difference in level of the coil 4 is thus removed and is flattened. The 1st insulating layer (SiO2)5, a magnetic layer (*Permally'')6, the 2nd insulating layer (SiO2)7, an upper coil layer (Al-Cu)8 and a protective film (SiO2)9 are successively laminated thereon, by which the thin film magnetic head is obtd. |
