| 摘要 |
PURPOSE:To produce a large quantity of piezoelectric element pieces easily to reduce the cost by forming many piezoelectric element pieces in the continuous state and subjecting them to etching, vapor-deposition of electrode films, etc. simultaneously and dividing them into individual piezoelectric element pieces accurately and easily. CONSTITUTION:Parts of four edges 1c... of a quartz plate 1 are subjected to sloping work as a thinning work to form four slopes 2..., and both end parts of the quartz plate 1 are made thinner than the center part, and plural grooves 3... are formed from one end face 1b of the quartz plate 1 to the part of the thin slope 2 near the other end face 1b, and thus, many quartz pieces 4... are formed in the continuous state. Thereafter, the quartz plate 1 is immersed in a fluoric acid for the purpose of washing it and removing the work distortion, and it is subjected vapor-deposition of electrode films. Quarts pieces 4 are divided individually along dividing lines 7. Since many quartz pieces 4... are subjected to etching, vapor-deposition of electrode films, etc. in the continuous state in this manner, many quartz pieces are produced easily and simultaneously. |
