| 摘要 |
PURPOSE:To uniformly and thinly grind a sample by the ion grinding method by comprising the captioned ion gun with anode and cathode cylinders arranged concentrically, coil that generates a magnetic field in the axial center direction, gun bottom plate that can freely be attached to and detached from the cathode cylinder, and cathode central rod that can vary the amount of protrusion from this gun bottom plate to the inner part of the anode cylinder. CONSTITUTION:The captioned ion gun is comprised with an anode cylinder 4 and a cathode cylinder 5 arranged concentrically around said cylinder 4, a gun bottom plate 9 which is freely fitted in and removed from one end of said cathode cylinder 5 and provided with an ionized gas induction port 7 and an anode voltage induction terminal 8, a variable length cathode central rod 10 that can freely vary the protruded length from said gun plate 9 into the inner part of an anode cylinder 4, and a group of electrodes 11... for ion acceleration and focusing. In addition, the section between the cathode cylinder 5 and the gun bottom plate 9 is sealed with an O-ring 12. |
