| 摘要 |
PURPOSE:To achieve the observation of a mask pattern without the influence of chromium spattered and etc. by detecting the cathode luminescence light passing througha light-transmission substrate by a light detector and displaying it on a TV display. CONSTITUTION:For the mask 1 which is carried to the opticalaxis of the ion beam ejected by an ion gun 5, an X-Y deflection electrode 10 and a deflection coil of a TV display 11 are driven by the same scan generator synchronizing circuit 9 to luster-scan the vicinity of a defect position of the mas 1 with the ion beam. As the ion beam is projected into the mas 1, the cathode luminescence light is emitted. Since the mas 1 allow the light to transmit through the glass part of it except the part of chromium pattern, the light generated by the ion for scanning the part except the chromium pattern enters into the light detector 12 arranged under the mask 1. The signal from the light detector 12 is amplified by an amplifier 13 and is led as the luminance modulation signal of the TV display 11 to form a mask pattern image on the TV display 11. |
