| 摘要 |
PURPOSE:To make it possible to detect a rupture of a diaphragm, by providing casings each connected with a pressure introducing pipe, on both side surfaces of the diaphragm, respectively, and as well, by providing a displacement-electricity converting section on one of both casings together with a flow rate detecting element disposed in its pressure introducing pipe. CONSTITUTION:Upper and lower casings for defining upper and lower diaphragm chambers 10', 11', respectively having upper and lower pressure introducing pipes 8, 9 are arranged on both side surfaces of a diaphragm 7. Further, a differential transducer 12 as a displacement-electricity converter, having a core 13 as a stationary detecting part and a differential coil 14 as a movable detecting part, is arranged on the top surface of the upper casing 10. Further, a flow rate detecting element 17 is disposed in such as, for example, the upper pressure introducing pipe 8. With this arrangement, fluid pressures P1, P2 above and below the diaphragm 7 are measured with the use of the differential transducer 12, and if a rupture of the diaphragm 7 occurs during both pressures P1, P2 are stable at fixed values, the flow rate of fluid is detected by the flow rate detecting element 7 so that a signal monitor A issues an alarm. |
