| 摘要 |
PURPOSE:To increase the reliability of transfer of a susceptor and to enable the automation of operation by providing an cutout or a groove in which a projection on a periphery of the susceptor is fitted on an end holding part of a sample rotating holder. CONSTITUTION:The front end of a susceptor 13 fits in a taper 27 of a sample rotating holder and when the sample rotating holder rotates, the first-step projection 18 of the susceptor 13 comes to the position of the cutout 21 arranged on the sample rotating holder. In this position, the susceptor is pressed down to fit the lower plane to the position of a projection 25 of the sample rotating holder. When the sample rotating holder rotates, the first-step projection 18 of the susceptor 13 fits along a groove 24 of the sample rotating holder and stops in the position where the groove 24 and the second-step projection 19 come in contact. Since the portion 23 of the sample rotating holder is given spring properties by an cutout 22, the second-step projection 19 of the susceptor 13 slides in the groove 24 to enter into the position of a cutout hole 26 by further rotation of the sample rotating holder and the projection 19 is held in the position of the cutout 26 with giving spaces for the both. |
