发明名称 ION SOURCE DEVICE
摘要 PURPOSE:To avoid unnecessary electronic impact heating of a supporting structure by providing an electronic shelter electrode between a heat negative pole supporting structure and a subsidiary electrode and by electrically connecting this electrode to the supporting body and to the shelter electrode respectively through resistances. CONSTITUTION:Heat electrons released from the surface of a subsidiary electrode 6 are also introduced in a large quantity into a heat negative pole supporting structure material 10 besides a heat electrode 5, and they unnecessarily heat this structure material 10. Therefore, an electronic shelter electrode 13 is installed between this structure material 10 and the subsidiary electrode 6. This electronic shelter electrode 13 is given a floating potential by electrically connected to both the subsidiary electrode 6 and the structure material 10 respectively through resistances and electron quantity flowing into the electronic shelter electrode 13 and electronic impact heating power thereof is suppressed. Thereby, unnecessary electronic impact heating of the structure 10 can be prevented and cooling conditions can be made easier.
申请公布号 JPS6065429(A) 申请公布日期 1985.04.15
申请号 JP19830172172 申请日期 1983.09.20
申请人 TOSHIBA KK 发明人 ITOU YASUYUKI;SUGAWARA TOORU
分类号 H01J37/08;G21K1/00;H01J3/04;H01J27/02;H01J27/26 主分类号 H01J37/08
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