| 摘要 |
PURPOSE:To make it possible to add a solid raw material to optical glass, by fluidizing the solid raw material under heating at a high temperature in a raw material supply system, and carrying the fluid raw material on a carrier gas from the raw material supply system to a vapor phase reaction system. CONSTITUTION:A channel switch 16 is closed in a channel (6a) of a raw material supply system 1, and a raw material (A) in a raw material container 10 of a raw material gas generation part 5 is heated at a high temperature in a heating furnace 11, melted and vaporized. The channel switch 16 is then opened to feed a carrier gas, e.g. Ar, under flow rate control with a mass flow controller (4a) through the channel (6a) into the raw material container 10. The vaporized solid raw material (A) is then carried by the carrier gas, passed through a mixing part 8 and fed into the vapor phase reaction system 2. |
