发明名称 (A) ;PHOTOETCHING RESIST COMPOSITION FOR FAR ULTRAVIOLET RAYS
摘要 PURPOSE:To prevent solids from being bitten into a plate valve, by a method wherein both side surfaces of a plate are provided with notches, cleaning water seats provided with cleaning water supplying ports are fitted to valve body walls faced to the notches, and cleaning water is ejected through the supplying ports when opening or closing the valve. CONSTITUTION:The valve plate 8 contained in a valve body 1 in a vertically movable manner is provided with the notches 11 at both side surfaces 8a not including a passage hole 9. On the other hand, the walls 1a of the valve body 1 faced to the notches 11 of the valve plate 8 are provided with cleaning water seats 12. In the course of opening or closing the valve plate 8, the notches 11 are communicated with cleaning water supplying ports 13, and cleaning water is ejected to a part where the diameters of the valve plate 8 and the valve body 1 are different from each other.
申请公布号 JPS6014235(B2) 申请公布日期 1985.04.12
申请号 JP19830129311 申请日期 1983.07.18
申请人 HITACHI LTD 发明人 UCHIDA KENJI;SAKAMOTO MASAKATSU
分类号 F16K3/00;F16K25/02 主分类号 F16K3/00
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