| 摘要 |
PURPOSE:To automatically and rapidly obtain a strictly heat equalized zone in a diffusion oven by a method in which an input and output relationship in a system where temperatures of three inputs and of three outputs mutually interfere is set, the observed values being given to the three inputs for obtaining parameters from the relationship, and the three inputs being determined by means of the parameters for setting the three outputs in predetermined values. CONSTITUTION:Heaters 21, 22, 23 and thermocouples 24, 25, 26 are connected to a controller 27. In an oven, profiling thermocouples 28, 29, 30 are provided near the left side, center and right side of a heat equalized zone A, respectively. A calibrating thermocouple 31 as the reference thermocouple is further provided such that it is movable in the central portion of the oven. Each of these thermocouples is connected to the controller. The controller 27 has functions of controlling the heater temperatures, for calculating the parameters in the electromotive force-temperature properties of the calibrating thermocouple, for calibrating the profiling thermocouples according to the calibrating thermocouples, for calculating parameters of the transmission function between the outside and inside temperature of the oven, and for feeding back, using the function of transmission, the difference between the observed values of the temperature in the oven and the calibrated temperature of the profiling thermocouple to the outside temperature of the oven. |
